JPH01127268U - - Google Patents

Info

Publication number
JPH01127268U
JPH01127268U JP1988021843U JP2184388U JPH01127268U JP H01127268 U JPH01127268 U JP H01127268U JP 1988021843 U JP1988021843 U JP 1988021843U JP 2184388 U JP2184388 U JP 2184388U JP H01127268 U JPH01127268 U JP H01127268U
Authority
JP
Japan
Prior art keywords
diaphragm
piezoresistance layer
semiconductor
pressure sensor
groove
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP1988021843U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1988021843U priority Critical patent/JPH01127268U/ja
Publication of JPH01127268U publication Critical patent/JPH01127268U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP1988021843U 1988-02-23 1988-02-23 Pending JPH01127268U (en])

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1988021843U JPH01127268U (en]) 1988-02-23 1988-02-23

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1988021843U JPH01127268U (en]) 1988-02-23 1988-02-23

Publications (1)

Publication Number Publication Date
JPH01127268U true JPH01127268U (en]) 1989-08-31

Family

ID=31239430

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1988021843U Pending JPH01127268U (en]) 1988-02-23 1988-02-23

Country Status (1)

Country Link
JP (1) JPH01127268U (en])

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009265012A (ja) * 2008-04-28 2009-11-12 Fujikura Ltd 半導体センサ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5839069A (ja) * 1981-08-31 1983-03-07 Shimadzu Corp 半導体ダイヤフラム

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5839069A (ja) * 1981-08-31 1983-03-07 Shimadzu Corp 半導体ダイヤフラム

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009265012A (ja) * 2008-04-28 2009-11-12 Fujikura Ltd 半導体センサ

Similar Documents

Publication Publication Date Title
JPH01127268U (en])
JPS6228153U (en])
JPS61192460U (en])
JPS62131453U (en])
JPH0466549U (en])
JPS6156543U (en])
JPH01127263U (en])
JPS6156544U (en])
JPH0425256U (en])
JPH0258350U (en])
JPS6219760U (en])
JPS6427636U (en])
JPS61131855U (en])
JPS59179352U (ja) 半導体圧力センサ
JPS61205155U (en])
JPH0213753U (en])
JPS5837530U (ja) 圧力検出装置
JPS63131154U (en])
JPH024266U (en])
JPH01129855U (en])
JPS607045U (ja) 半導体圧力センサ
JPS61182051U (en])
JPS6249254U (en])
JPS61110138U (en])
JPS6172866U (en])